Title :
Analysis and computation of Gauss trajectory and aberration in the electrostatic-magnetic complex system
Author_Institution :
Beijing Vacuum Electron. Res. Inst., China
Abstract :
In this paper, the complex system-electrostatic lens of two equal radial cylinders superimposed with the deflection field-has been introduced. Using the principle of minimal action, the functional minimum and Euler equation have been solved. The results show properties of the Gauss trajectory and third order aberration. Aberrations include three parts, and can be expressed in matrix form. The electrons can go back to the Z axis. The aberrations can cancel out each other, and better spot performance can be obtained. When an electrostatic lens is placed near a screen, large aberrations will be produced
Keywords :
aberrations; electron optics; electrostatic lenses; Euler equation; Gauss trajectory; aberrations; electrostatic lens; electrostatic-magnetic complex system; equal radial cylinders; functional minimum; principle of minimal action; spot performance; superimposed with deflection field; Electrodes; Electrons; Electrostatic analysis; Equations; Gaussian processes; Lenses; Magnetic fields; Magnetic properties; Utility programs; Vacuum systems;
Conference_Titel :
Information Display, 1999. ASID '99. Proceedings of the 5th Asian Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
957-97347-9-8
DOI :
10.1109/ASID.1999.762732
