Title :
Membrane supported spiral inductors for up to 10 GHz filter applications
Author :
Muller, Andrei A. ; Neculoiu, D. ; Brezeanu, G.
Author_Institution :
Politehnice Univ., Bucharest
Abstract :
The paper describes a new approach for the design of lumped components supported on high resistivity silicon substrates as well as on thin dielectric membranes obtained by silicon micromachining. The method employs intensive electromagnetic modeling and layout optimization. The influence of various geometrical parameters (number of coils, width of the line, thickness of the metallization, etc) is analyzed. The quality factor for micromachined inductors is compared with those obtained for the bulk silicon supported structures and a significant increase of this parameter is observed for the membrane supported structures. The simulation were used in the design modeling and manufacturing of micromachined L-C type filter structures in the 1-10 GHz frequency band
Keywords :
high-pass filters; inductors; low-pass filters; micromachining; 1 to 10 GHz; L-C type filter structures; Si; design modeling; dielectric membranes; electromagnetic modeling; frequency band; quality factor; silicon micromachining; silicon substrates; spiral inductors; Biomembranes; Conductivity; Dielectric substrates; Electromagnetic modeling; Filters; Inductors; Micromachining; Optimization methods; Silicon; Spirals;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558812
