High efficiency 400 dpi AlGaAs LED array fabrication for PMS (polygon mirror scanning)

Author

Kim, In Hoe ; Park, Kwang Bum ; Moon, Hyun Chan

Author_Institution

Electron. Devices Res. Centre, Korea Electron Technol. Inst., Pyungtaek, South Korea

fYear

1999

fDate

1999

Firstpage

151

Lastpage

155

Abstract

A PMS consists of LED array, lens, polygon-mirror, and motor. A PMS´s light sources is the linear LED array. We have fabricated a 400 dpi LED array using GaAs/AlGaAs (Al~0.65) single heterojunction structure. Problems of AlGaAs LED arrays are among the emitters. Thus, we have performed isolation by RIE and wet etching. RIE experiments were carried out at room temperature and used a mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness

Keywords

III-V semiconductors; LED displays; aluminium compounds; brightness; etching; gallium arsenide; isolation technology; mirrors; ohmic contacts; sputter etching; AlGaAs; AuGe-Ni-Au; AuZn-Pd-Au; GaAs-AlGaAs; LED array fabrication; RIE; high brightness; high efficiency; isolation; linear LED array; low forward turn-on voltages; low power consumption; ohmic contacts; polygon mirror scanning; single heterojunction structure; virtual displays; wet etching; Fabrication; Gallium arsenide; Gold; Heterojunctions; Lenses; Light emitting diodes; Light sources; Optical arrays; Temperature; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Display, 1999. ASID '99. Proceedings of the 5th Asian Symposium on

Conference_Location

Hsinchu

Print_ISBN

957-97347-9-8

Type

conf

DOI

10.1109/ASID.1999.762735

Filename

762735