Title :
Synthesis and characterization of indium tin oxide and cerium dioxide thin films by sol-gel method
Author :
Ciuciumis, Alina ; Cernica, Ileana
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest
Abstract :
The paper presents indium tin oxide and cerium dioxide thin films obtained by sol-gel method and deposited on the different wood substrates. Films deposition was performed by immersion of the substrates into coating solution and flow-coating process. Investigation of the surface chemistry and morphology of the wood substrates before and after deposition were obtained by means of atomic force microscopy and optical microscopy. The sol-gel deposit on the wood substrates lowered the rates of water and water vapour sorption (absorption and/or adsorption)
Keywords :
adsorption; atomic force microscopy; cerium compounds; indium compounds; sol-gel processing; surface chemistry; surface morphology; thin films; CeO2; ITO; InSnO; adsorption; atomic force microscopy; cerium dioxide thin films synthesis; flow-coating process; indium tin oxide thin films synthesis; optical microscopy; sol-gel method; surface chemistry; surface morphology; thin films deposition; water vapour sorption; wood substrates; Atom optics; Atomic force microscopy; Cerium; Coatings; Indium tin oxide; Optical films; Optical microscopy; Sputtering; Surface morphology; Transistors;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558817
