Synthesis and characterization of indium tin oxide and cerium dioxide thin films by sol-gel method

Author

Ciuciumis, Alina ; Cernica, Ileana

Author_Institution

Nat. Inst. for R&D in Microtechnol., Bucharest

Volume

2

fYear

2005

fDate

5-5 Oct. 2005

Firstpage

425

Abstract

The paper presents indium tin oxide and cerium dioxide thin films obtained by sol-gel method and deposited on the different wood substrates. Films deposition was performed by immersion of the substrates into coating solution and flow-coating process. Investigation of the surface chemistry and morphology of the wood substrates before and after deposition were obtained by means of atomic force microscopy and optical microscopy. The sol-gel deposit on the wood substrates lowered the rates of water and water vapour sorption (absorption and/or adsorption)

Keywords

adsorption; atomic force microscopy; cerium compounds; indium compounds; sol-gel processing; surface chemistry; surface morphology; thin films; CeO₂; ITO; InSnO; adsorption; atomic force microscopy; cerium dioxide thin films synthesis; flow-coating process; indium tin oxide thin films synthesis; optical microscopy; sol-gel method; surface chemistry; surface morphology; thin films deposition; water vapour sorption; wood substrates; Atom optics; Atomic force microscopy; Cerium; Coatings; Indium tin oxide; Optical films; Optical microscopy; Sputtering; Surface morphology; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International

Conference_Location

Sinaia

Print_ISBN

0-7803-9214-0

Type

conf

DOI

10.1109/SMICND.2005.1558817

Filename

1558817