Title :
Controlling patterning of polymeric surfaces during flexible fabrication with excimer laser
Author :
Mocanu, Elena ; Sterian, P.
Author_Institution :
Univ. Center for Opt. Eng. & Photonics, Bucharest Polytech. Univ., Bucharest, Romania
Abstract :
In this paper we present results obtained with a ComPEX 205 KrF laser and an optical system that assures a working precision of 1mum. Our main research area is the improving the parameters of microfabrication of the polymers used in the new generation of microelectronics. We try to obtain better results by understanding the chemical mechanism of laser-polymer interaction.
Keywords :
excimer lasers; laser materials processing; microfabrication; polymers; ComPEX 205 KrF laser; excimer laser; microelectronics; microfabrication; patterning; polymeric surfaces; Electromagnetic scattering; Metamaterials; Microwave antenna arrays; Optical arrays; Optical control; Optical device fabrication; Polymers; Q factor; Resonance; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5191777
