Title :
A modified constant field charge pumping method for sensitive profiling of near-junction charges
Author :
Von Emden, Walter ; Krautschneider, Wolfgang ; Tempe, Georg ; Hagenbeck, Rainer ; Beug, M. Florian
Author_Institution :
Hamburg Univ. of Technol., Hamburg
Abstract :
The functionality of nonvolatile memories with lateral multi-bit charge storage capabilities like NROM/TwinFlash is critically related to spatial separation of the injected charge quantities to discriminate different logical states. In this paper we develop an adapted methodology to extract local charge densities based on the constant field charge pumping method. Our method overcomes the problem of non self-consistency of conventional constant field charge pumping by determination of the spatial coordinate after every injection step. The method is demonstrated to directly extract the electron/hole mismatch after program and erase injection.
Keywords :
flash memories; random-access storage; NROM; TwinFlash; electron/hole mismatch; erase injection; injected charge quantities; lateral multibit charge storage capabilities; local charge densities; logical states; modified constant field charge pumping method; near-junction charges; nonvolatile memories; program injection; sensitive profiling; Charge carrier processes; Charge pumps; Electron traps; Extrapolation; Frequency; Geometry; Nonvolatile memory; Signal analysis; Solid modeling; Voltage;
Conference_Titel :
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location :
Munich
Print_ISBN :
978-1-4244-1123-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2007.4430932