DocumentCode
2781265
Title
Design improvement of RF 3D MIM damascene capacitor
Author
Capraro, S. ; Bermond, C. ; Vo, T.T. ; Piquet, J. ; Fléchet, B. ; Thomas, M. ; Farcy, A. ; Torres, J. ; Cremer, S. ; Guichard, E. ; Haen, A.
Author_Institution
Savoie Univ., Le Bourget
fYear
2007
fDate
11-13 Sept. 2007
Firstpage
394
Lastpage
397
Abstract
High frequency characterizations and simulations of 3D damascene metal-insulator-metal (MIM) capacitors are presented. We focused on the impact of the design on the performance of integrated capacitors. Results showed that properties of MIM capacitor get improved with specific design recommendations on electrodes shape.
Keywords
MIM devices; capacitors; RF 3D MIM damascene capacitor; metal-insulator-metal capacitors; Capacitance; Dielectrics; Electrodes; Fingers; Hafnium; Integrated circuit reliability; MIM capacitors; Metal-insulator structures; Radio frequency; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location
Munich
ISSN
1930-8876
Print_ISBN
978-1-4244-1123-8
Electronic_ISBN
1930-8876
Type
conf
DOI
10.1109/ESSDERC.2007.4430961
Filename
4430961
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