DocumentCode
2781328
Title
An Integrated Silicon Micromechanical Interferometer
Author
Vadekar, A. ; Huang, W.-P. ; Nathan, A.
Author_Institution
University of Waterloo, Canada
fYear
1992
fDate
1992
Firstpage
233
Lastpage
236
Keywords
Electromagnetic waveguides; Etching; Integrated optics; Micromechanical devices; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Sensors Conference, 1992. 8th
Print_ISBN
0-7803-0518-3
Type
conf
DOI
10.1109/OFS.1992.763030
Filename
763030
Link To Document