Title :
Electrothermal tuning and SNR of nanoelectromechanical resonators
Author :
Jun, Seong Chan ; Baik, C.W. ; Kim, S.I. ; Kim, J.M. ; Kim, H. Jin ; Huang, X.M.H. ; Hone, J.
Author_Institution :
Samsung Adv. Inst. of Technol., Yongin
Abstract :
Effects of electrothermal tuning mechanisms for nanoelectromechnical resonators are demonstrated. Voltages induced by oscillation of Al/SiC nanoresonators in a moderate magnetic filed are measured using a room-temperature tabletop setup in moderate vacuum. The dynamic range as well as the resonance frequency of the resonator can be reversibly controlled by electrothermal tuning using DC voltage. This paper presents experimental results on the resonance frequency, Q factor and dynamic range during the electrothermal tuning. As the input DC power increases, Q factor decreases due to the decrease in the resonance frequency, and SNR decreases due to the reduced amplitude or increased noise.
Keywords :
aluminium; micromechanical resonators; nanotechnology; silicon compounds; tuning; Al; DC voltage; Q factor; SNR; SiC; electrothermal tuning; nanoelectromechanical resonator; nanoresonator; oscillation; resonance frequency; Dynamic range; Electrothermal effects; Magnetic resonance; Noise reduction; Q factor; Resonant frequency; Signal to noise ratio; Silicon carbide; Tuning; Voltage control;
Conference_Titel :
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location :
Munich
Print_ISBN :
978-1-4244-1123-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2007.4430971
