Integrated Microfluidic System for DNA Analysis

In this paper, we report the fabrication of a Si based microfluidic system, which is integrated with electrodes and polymer structures. Low temperature Si to glass bonding using PMMA as an intermediate layer has been developed to integrate electrodes and PMMA structures with Si channels. The electrodes in the microchannel are used for electrokinetic-based DNA stretching. DNA molecules are stretched using high frequency ac electric fields inside Si channels that are 100 μm wide and 20 μm deep.