DocumentCode
2783173
Title
Integrated Microfluidic System for DNA Analysis
Author
Dukkipati, V.R. ; Pang, S.W.
Author_Institution
Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI, 48109
Volume
1
fYear
2006
fDate
17-20 June 2006
Firstpage
162
Lastpage
165
Abstract
In this paper, we report the fabrication of a Si based microfluidic system, which is integrated with electrodes and polymer structures. Low temperature Si to glass bonding using PMMA as an intermediate layer has been developed to integrate electrodes and PMMA structures with Si channels. The electrodes in the microchannel are used for electrokinetic-based DNA stretching. DNA molecules are stretched using high frequency ac electric fields inside Si channels that are 100 μm wide and 20 μm deep.
Keywords
DNA; Microfluidic; PMMA; bonding; eletcrokinetic; Bonding; DNA; Electrodes; Fabrication; Frequency; Glass; Microchannel; Microfluidics; Polymers; Temperature; DNA; Microfluidic; PMMA; bonding; eletcrokinetic;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN
1-4244-0077-5
Type
conf
DOI
10.1109/NANO.2006.247597
Filename
1717047
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