Title :
A Fine Pitch And High Aspect Ratio Bump Array For Flip-chip Interconnection
Author :
Yamada, Hiroshi ; Konooh, Y. ; Saito, Masayuki
Author_Institution :
Toshiba Corporation
Keywords :
Aluminum; Capacitive sensors; Copper; Fabrication; Integrated circuit interconnections; Large scale integration; Polyimides; Resists; Substrates; Wiring;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN :
0-7803-0755-0
DOI :
10.1109/IEMT.1992.639906