• DocumentCode
    2783318
  • Title

    Inorganic materials solution for multi-chip modules and high speed multi-layer hybrids

  • Author

    Shorthouse, G. ; Berzins, A. ; Wardell, K. ; Smythe, J. ; Goodfellow, D.

  • Author_Institution
    Johnson Matthey Technology Centre
  • fYear
    1992
  • fDate
    1992
  • Firstpage
    213
  • Lastpage
    220
  • Keywords
    Conducting materials; Conductive films; Dielectric losses; Dielectric thin films; Etching; Gold; Inorganic materials; Integrated circuit interconnections; Space technology; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Manufacturing Technology Symposium, 1992. IEMT 1992. 12th International
  • Print_ISBN
    0-7803-0629-5
  • Type

    conf

  • DOI
    10.1109/IEMT.1992.763413
  • Filename
    763413
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2783318