DocumentCode
2784429
Title
Preparation of polyimide films by vapor deposition polymerization and their photocurrents
Author
Iida, Kazuo ; Nohara, Tsukasa ; Nakamura, Shuhei ; Ieda, Mirai ; Sawa, Goro
Author_Institution
Mie University
fYear
1988
fDate
1988
Firstpage
227
Lastpage
230
Keywords
Chemical vapor deposition; Fabrication; Infrared heating; Infrared spectra; Monitoring; Photoconductivity; Polyimides; Polymer films; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
Print_ISBN
4-88686-041-9
Type
conf
DOI
10.1109/ISEIM.1988.763480
Filename
763480
Link To Document