Title :
Electrical properties of TiO2 thin film prepared by sol-gel method
Author :
Sato, Shigeki ; Taguchi, Haruo ; Yoshimura, Naoko
Author_Institution :
Akita University
Keywords :
Conductivity; Crystallization; Electric variables measurement; Fluid flow measurement; Power measurement; Semiconductor films; Semiconductor thin films; Substrates; Temperature; Transistors;
Conference_Titel :
Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
Print_ISBN :
4-88686-041-9
DOI :
10.1109/ISEIM.1988.763482