DocumentCode
2785044
Title
Toward 3D microfluidic structures fabricated with two-photon laser machining
Author
Liu, Yihong ; Pyrak-Nolte, Laura J. ; Nolte, David
Author_Institution
Department of Physics, Purdue University, West Lafayette, IN 47907, USA
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
We have developed a method to fabricate 31) microfluidic systems with two-photon polymerization in SU-8 photoresist. This approach will be an easy and accurate way to fabricate microfluidic systems simulating complex microstructures.
Keywords
Bonding; Laser theory; Machining; Microchannel; Microfluidics; Microstructure; Optical device fabrication; Polymers; Resists; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431178
Filename
4431178
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