• DocumentCode
    2785044
  • Title

    Toward 3D microfluidic structures fabricated with two-photon laser machining

  • Author

    Liu, Yihong ; Pyrak-Nolte, Laura J. ; Nolte, David

  • Author_Institution
    Department of Physics, Purdue University, West Lafayette, IN 47907, USA
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have developed a method to fabricate 31) microfluidic systems with two-photon polymerization in SU-8 photoresist. This approach will be an easy and accurate way to fabricate microfluidic systems simulating complex microstructures.
  • Keywords
    Bonding; Laser theory; Machining; Microchannel; Microfluidics; Microstructure; Optical device fabrication; Polymers; Resists; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2007. QELS '07
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/QELS.2007.4431178
  • Filename
    4431178