DocumentCode
2785135
Title
Si-on-Si MCMs As a low cost packaging solution
Author
Kusaka, Teruo ; Senba, Naoji ; Nishizawa, Atsushi ; Takahashi, Nobuaki
Author_Institution
NEC Corporation
fYear
1994
fDate
1994
Keywords
Chip scale packaging; Costs; Integrated circuit interconnections; Laboratories; Large scale integration; National electric code; Research and development; Semiconductor device packaging; Substrates; Systems engineering and theory;
fLanguage
English
Publisher
ieee
Conference_Titel
MCM and VLSI Packaging Techniques and Manufacturing Technologies, 1994. Workshop on
Type
conf
DOI
10.1109/WPTMT.1994.763518
Filename
763518
Link To Document