Title :
Experimental and numerical results for an aberration-corrected photoemission electron microscope
Author :
Konenkamp, R. ; Jones, T. ; Elstner, J. ; Word, R. ; Rempfer, G. ; Dixon, T. ; Almarez, L. ; Nisenfeld, M. ; Skoczylas, W.
Author_Institution :
Physics Department Portland State University, 1719 SW 10th Avenue, Portland, OR 97201, rkoe@pdx.edu
Abstract :
We report recent progress in the construction of a new aberration-corrected photoemission electron microscope. The correction element in this instrument is a hyperbolic electron mirror, correcting for chromatic and spherical aberration. We present results from a numerical simulation combining a trajectory and wave-optical analysis, and we discuss the calculation of the modulation transfer function in this approach. First images on nano-structured metal and semiconductor surfaces have been obtained with the new instrument and are also presented.
Keywords :
aberration correction; electron microscopy; photoemission; Electron beams; Electron microscopy; Electron optics; Instruments; Magnetic force microscopy; Mirrors; Optical surface waves; Photoelectricity; Photoelectron microscopy; Stimulated emission; aberration correction; electron microscopy; photoemission;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247710
