Title :
High-Throughput Fabrication of Nanoelectrodes on Polymer using Nanoinjection and Trench-Filling Techniques
Author :
Rust, Michael J. ; Do, Jaephil ; Lee, Se Hwain ; Ahn, Choing H.
Author_Institution :
Center for BioMEMS and Nanobiosystems, Department of Electrical & Computer Engineering and Computer Science, University of Cincinnati, Cincinnati, OH 45221, USA, rustmj@ececs.uc.edu
Abstract :
In this paper, high throughput fabrication of nanoelectrodes on polymer using nanoinjection and trench-filling techniques is developed and results are presented. The new fabrication method for producing nanoelectrodes on polymer substrates is characterized with scanning electron microscopy, surface profilometry, and atomic force microscopy. This method may be applied to mass-production of low-cost polymer biochips containing ultra-sensitive nanoelectrodes for biosensors in point-of-care medicine.
Keywords :
injection molding; nanoelectrodes; nanofabrication; Atomic force microscopy; Biosensors; Delay; Electrodes; Fabrication; Lab-on-a-chip; Molecular biophysics; Nanoscale devices; Nickel; Polymers; injection molding; nanoelectrodes; nanofabrication;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247717
