DocumentCode
2785474
Title
Fabrication of OTFT Array on Plastic Substrate by using Nanocontact Printing and Low Temperature Process
Author
Jo, Jeongdai ; Lee, Eung-Sug ; Esashi, Masayoshi
Author_Institution
Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM), #171, Jang-dong, Yuseong-gu, Daejeon, 305-343, Korea, micro@kimm.re.kr
Volume
2
fYear
2006
fDate
17-20 June 2006
Firstpage
588
Lastpage
591
Abstract
The flexible organic thin film transistor (OTFT) array to use as a switching device for an organic light emitting diode (OLED) was designed and fabricated in the microcontact printing and low-temperature processes. The gate, source, and drain electrode patterns of OTFT were fabricated by nanocontact printing which is high-resolution lithography technology using polydimethylsiloxane(PDMS) stamp. The OTFT array with dielectric layer and organic active semiconductor layers formed at room temperature or at a temperature lower than 40°C. The nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even nano size, and reduced the procedure by 10 steps compared with photolithography. Since the process was done in low temperature, there was no pattern transformation and bending problem appeared. Also, it was possible to increase close packing of molecules by SAM, to improve electric field mobility, to decrease contact resistance, and to reduce threshold voltage by using a big dielectric and fabricate nanopatterns.
Keywords
OTFT array; PDMS stamp; SAM; flexible display; nanocontact printing(nCP); organic semiconductor; Dielectrics; Fabrication; Lithography; Organic light emitting diodes; Organic thin film transistors; Plastics; Printing; Substrates; Temperature; Thin film transistors; OTFT array; PDMS stamp; SAM; flexible display; nanocontact printing(nCP); organic semiconductor;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN
1-4244-0077-5
Type
conf
DOI
10.1109/NANO.2006.247721
Filename
1717171
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