DocumentCode :
2785474
Title :
Fabrication of OTFT Array on Plastic Substrate by using Nanocontact Printing and Low Temperature Process
Author :
Jo, Jeongdai ; Lee, Eung-Sug ; Esashi, Masayoshi
Author_Institution :
Intelligent & Precision Machinery Research Division, Korea Institute of Machinery & Materials (KIMM), #171, Jang-dong, Yuseong-gu, Daejeon, 305-343, Korea, micro@kimm.re.kr
Volume :
2
fYear :
2006
fDate :
17-20 June 2006
Firstpage :
588
Lastpage :
591
Abstract :
The flexible organic thin film transistor (OTFT) array to use as a switching device for an organic light emitting diode (OLED) was designed and fabricated in the microcontact printing and low-temperature processes. The gate, source, and drain electrode patterns of OTFT were fabricated by nanocontact printing which is high-resolution lithography technology using polydimethylsiloxane(PDMS) stamp. The OTFT array with dielectric layer and organic active semiconductor layers formed at room temperature or at a temperature lower than 40°C. The nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even nano size, and reduced the procedure by 10 steps compared with photolithography. Since the process was done in low temperature, there was no pattern transformation and bending problem appeared. Also, it was possible to increase close packing of molecules by SAM, to improve electric field mobility, to decrease contact resistance, and to reduce threshold voltage by using a big dielectric and fabricate nanopatterns.
Keywords :
OTFT array; PDMS stamp; SAM; flexible display; nanocontact printing(nCP); organic semiconductor; Dielectrics; Fabrication; Lithography; Organic light emitting diodes; Organic thin film transistors; Plastics; Printing; Substrates; Temperature; Thin film transistors; OTFT array; PDMS stamp; SAM; flexible display; nanocontact printing(nCP); organic semiconductor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
Type :
conf
DOI :
10.1109/NANO.2006.247721
Filename :
1717171
Link To Document :
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