Title :
High-power multi-beam AlGaAs TQW lasers with buried-ridge, stripe structure fabricated by using novel etching stop technique
Author :
Shima, A. ; Kadowaki, T. ; Tada, H. ; Miura, T. ; Shiba, T. ; Miyashita, M. ; Kageyarna, S. ; Omura, E. ; Aiga, M. ; Ikeda, K.
Author_Institution :
Mitsubishi Electric Corporation
Abstract :
Light ournut Dower over 1OOmW is obtained even at 60??C from each element of a four-beam laser wrth a mple*quantum well active layer. This laser has a buried-ridge, inner-stripe structure formed by a newly developed etching stop technique, which realizes reproducible fabrication of a multi-beam laser with excellent and uniform characteristics For an individually addressable laser array for parallel data processing.
Keywords :
Etching; Laser modes; Masers; Optical arrays; Optical crosstalk; Optical recording; Power generation; Power lasers; Quantum well lasers; Semiconductor laser arrays;
Conference_Titel :
Semiconductor Laser Conference , 1992. Conference Digest. 13th IEEE International
Conference_Location :
Kagazwa, Japan
Print_ISBN :
4-930813-51-4
DOI :
10.1109/ISLC.1992.763590
