Title :
Prospects of the automation for ULSI manufacturing
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
The present condition of semiconductor wafer manufacturing line automation and future prospects are described. The wafer manufacturing line includes direct operations such as the setting of processing parameters for the equipment, the inspection of the products, and the transport of wafers between equipment. It also includes indirect operations such as production control, quality control, and equipment control which maintain the manufacturing line´s operation. It is shown that these operations can be subject to automation. Automated processing, automated transport, and automated line control are considered
Keywords :
VLSI; computerised materials handling; integrated circuit manufacture; manufacturing computer control; production control; quality control; ULSI manufacturing; automated line control; automated transport; equipment control; factory automation; inspection; line automation; processing parameters; production control; quality control; semiconductor wafer manufacturing; wafer transport; Automatic control; Computer aided manufacturing; Manufacturing automation; Manufacturing processes; Production control; Quality control; Quality management; Robotics and automation; Semiconductor device manufacture; Ultra large scale integration;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International
Conference_Location :
Washington, DC
DOI :
10.1109/IEMT9.1990.114973
