Three-dimensional Nano Temperature Sensors fabricated using focused ion beam chemical vapour deposition

In this work, we illustrate the fabrication of nano temperature sensors using focused ion beam chemical vapor deposition (FIB-CVD) of tungsten over atomic force microscope (AFM) cantilever, for sensing temperature distribution in local area. The FIB-CVD sensors were calibrated and the temperature coefficient of resistance shows positive characteristics. Building sensors by this approach is quite faster and easier to fabricate than other reported temperature sensing devices and can be modified to a mass production technique.