Title :
Nanoporous Pd Film Sensors for Detection of High Concentration Hydrogen
Author :
Ding, Dongyan ; Chen, Zhi
Author_Institution :
Department of Electrical and Computer Engineering, University of Kentucky, Lexington, KY 40506, USA
Abstract :
Blistering of Pd films upon absorption of high concentration hydrogen is one of the big problems for hindering wide application of Pd-film hydrogen sensors. We fabricated robust nanoporous Pd sensors with anodic aluminum oxide (AAO) as a substrate and Ni as a transition layer. The resistive sensors have a quick and reversible response to hydrogen gas at room temperature. Unlike dense Pd films supported by traditional wafers, the AAO-supported nanoporous films are highly stable in detecting high concentration hydrogen (up to 10% H2).
Keywords :
hydrogen sensor; nanoporous Pd; resistance; stablity; Absorption; Gas detectors; Hydrogen; Nanoporous materials; Optical films; Robustness; Semiconductor films; Substrates; Temperature sensors; Thick film sensors; hydrogen sensor; nanoporous Pd; resistance; stablity;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247773
