Development of CNT Based Sensor Array on a MUMPs Chip

Author

Lai, King W C ; Xi, Ning ; Li, Wen J. ; Kwong, C.P.

Author_Institution

The Robotics and Automation Laboratory, Michigan State University, East Lansing, M. I., kinglai@egr.msu.edu

Volume

2

fYear

2006

fDate

17-20 June 2006

Firstpage

798

Lastpage

801

Abstract

A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in, μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices.

Keywords

CNT sensors; DEP manipulation; micro-robotic spotting; nano batch fabrication; nano manufacturing; Assembly; Carbon nanotubes; Costs; Dielectrophoresis; Manufacturing automation; Manufacturing processes; Microelectrodes; Power dissipation; Production; Sensor arrays; CNT sensors; DEP manipulation; micro-robotic spotting; nano batch fabrication; nano manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on

Print_ISBN

1-4244-0077-5

Type

conf

DOI

10.1109/NANO.2006.247779

Filename

1717229