Application of digital holography in microscopic object measurement

Author

Song, Xiufa ; Tang, Zhiwei ; Wang, Huaying

Author_Institution

Hebei Univ. of Eng., Handan, China

fYear

2009

fDate

17-19 June 2009

Firstpage

2057

Lastpage

2060

Abstract

Digital holography is an emergent imaging technique which provides complete three-dimensional information of an object. The imaging resolution and the recording condition of the digital holography with pre-magnification is analyzed and validated. The principle of shape measurement by digital holography is analyzed. Experimental investigations have been performed for a USAF test target. The lateral resolution with approaching to 1 mum has been achieved experimentally. The results show that digital holography is a very effective technology to be used as shape measuring of microscopic object.

Keywords

holography; image processing; imaging; USAF test target; autofocusing; digital holography; imaging resolution; microscopic object measurement; recording; shape measurement; Charge coupled devices; Digital recording; High-resolution imaging; Holography; Image analysis; Image reconstruction; Image resolution; Image storage; Microscopy; Shape measurement; Autofocusing; Digital holographic microscopy; Digital holography; Microscopic imaging and measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Control and Decision Conference, 2009. CCDC '09. Chinese

Conference_Location

Guilin

Print_ISBN

978-1-4244-2722-2

Electronic_ISBN

978-1-4244-2723-9

Type

conf

DOI

10.1109/CCDC.2009.5192140

Filename

5192140