Modeling of integrated RF passive devices

We describe the use of an electromagnetic (EM) simulator for modeling integrated RF components and circuits. Modern EM simulators are fast and accurate enough to provide good models of such components. An important aspect of advanced IC processes is that the physical properties of wires (width, thickness, and resistance) vary depending on the surrounding wiring. We discuss how the EMX simulator [1] handles width-and spacing-dependent properties in the process description. Because the simulator handles mask-ready layout without the need for manual simplification, it is feasible to simulate thousands of possible designs and build scalable component models. Such scalable models allow fast choices of optimal components that meet user-supplied specifications.