Title :
Electro-Optical Characterization of Patterned Thin Metal Film Ni2Si–4H SiC Schottky Photodiodes for Ultraviolet Light Detection
Author :
Mazzillo, Massimo ; Sciuto, Antonella ; Marchese, Salvatore
Author_Institution :
R&D Ind. & Power Discrete Group, STMicroelectron., Catania, Italy
Abstract :
The use of healthcare sensors in portable and wearable devices has drawn increasing attention in the last few months. More particularly, the integration of ultraviolet (UV) light sensors to monitor UV sunlight radiation in next generation smartphones has been widely discussed recently. Here, we propose 4H-SiC Schottky photodiodes with three different geometries suitably designed to operate in photovoltaic condition for UV light monitoring. The electrical and optical characteristics of these devices are investigated as a function of the bias and temperature applied to the detectors.
Keywords :
Schottky diodes; electric sensing devices; electro-optical devices; hydrogen; infrared detectors; nickel compounds; optical sensors; photodetectors; photodiodes; silicon compounds; thin film sensors; ultraviolet detectors; wide band gap semiconductors; (UV) light sensors; Electro-Optical Characterization; Ni2Si-H-SiC; Patterned Thin Metal Film Schottky Photodiodes; UV light monitoring; UV sunlight radiation monitor; Ultraviolet Light Detection; healthcare sensors; photovoltaic condition; portable devices; smartphones; wearable devices; Detectors; Films; Metals; Photodiodes; Semiconductor device measurement; Temperature measurement; Wavelength measurement; 4H-SiC; Schottky photodiodes; UV detectors; active area; responsivity; thin metal film;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2014.2367546
