A wafer scale dynamic thermal scene generator

As a prototype WSTA (wafer scale transducer array), a wafer scale dynamic thermal scene generator is being developed to generate a controllable infrared (IR) image for use in calibrating IR detector arrays. The basic array consists of two cell types, one being a thermal pixel containing a poly Si resistor sitting on a suspended oxide bridge. The second cell contains the addressing, intensity register, and current level control electronics. Unlike digital WSI designs, WSTA redundancy efforts must emphasize local over global transducer sparing even considering cluster effects. Granularity in transducer location drives local pixel cells into creating small subtransducer arrays, with multiple devices at each site turned on for a single pixel. The control cells are allowed a larger substitution area than the thermal transducer