Statistical process characterization in advanced analog IC manufacturing

Author

Carlson, Arvid C. ; Sundaram, Sam L.

Author_Institution

Motorola Inc., Mesa, AZ, USA

fYear

1990

fDate

1-3 Oct 1990

Firstpage

135

Lastpage

140

Abstract

The device parameter drift of a JFET operational amplifier is discussed in terms of yield loss and product quality of analog ICs. Planned statistical experimentation was used to identify process factors that were causing drift. The improvements obtained using statistical process characterization and the resultant analog IC yield enhancement are described. The scenario presented demonstrates the essential need for a statistical approach to solve complex IC manufacturing problems. The multidisciplinary approach involves statistics, device physics, process characterization, device characterization, and manufacturing

Keywords

analogue circuits; integrated circuit manufacture; operational amplifiers; quality control; statistical process control; JFET operational amplifier; advanced analog IC manufacturing; device characterization; device parameter drift; multidisciplinary approach; product quality; statistical experimentation; statistical process characterization; yield loss; Analog integrated circuits; Automatic testing; Circuit testing; JFET circuits; Manufacturing processes; Operational amplifiers; Packaging; Process control; System testing; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International

Conference_Location

Washington, DC

Type

conf

DOI

10.1109/IEMT9.1990.114995

Filename

114995