Title :
Refractive Gauss-to-Tophat beam shapers improve structure quality and speed in micro-machining
Author :
Homburg, Oliver ; Toennissen, Frank ; Ganser, Heiko ; Mitra, Thomas ; Lissotschenko, Vitalij
Author_Institution :
LIMO-Lissotschenko Mikrooptik GmbH, Bookenburgweg 4-8, 44319 Dortmund, Germany
Abstract :
The transformation principle of a Gaussian beam into a homogeneous top-hat profile by means of free-form refractive micro-optics is reviewed. Various flat-top profiles achieved with different laser sources as well as micro-machining results are demonstrated.
Keywords :
Gaussian processes; Laser beams; Laser modes; Optical design; Optical device fabrication; Optical devices; Optical refraction; Power lasers; Production; Resists;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431503
