Title :
Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing
Author :
Darscht, Maxim Ya ; Miklyaev, Yuri V. ; Mikhailov, Alexei V. ; Lissotschenko, Vitalij N.
Author_Institution :
LIMO GmbH Bookenburgweg 4-8 44319 Dortmund, Germany
Abstract :
A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.
Keywords :
Annealing; Glass; Laser beams; Laser sintering; Laser stability; Optical design; Optical films; Optical pulses; Solid lasers; Spatial coherence;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431516
