Title :
High precision and high speed cutting of 4th generation OLED masks with LaserMicroJet®
Author :
Mai, T.A. ; Richerzhagen, B.
Author_Institution :
Synova SA, Ch. de la Dent-d¿Oche 1, CH-1024 Ecublens, Switzerland
Abstract :
A new micro-machining technology - the water jet guided laser, also called as LaserMicroJet® technology - has been developed for the manufacturing of sophisticated and heat sensitive OLED masks.
Keywords :
Costs; Fiber lasers; Gas lasers; Laser beam cutting; Laser modes; Manufacturing; Optical materials; Organic light emitting diodes; Water heating; Water jet cutting;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431521
