Title :
The impact of ultrashort femtosecond pulse-shaping technology for micromachining
Author_Institution :
Department of Chemistry and Department of Physics and Astronomy, Michigan State University, East Lansing, 48824, USA
Abstract :
Ultrashort laser pulses improve micromachining but they suffer significant phase distortions when focused by microscope objectives. Breakthrough technology to correct high order phase distortions is used to improve the machining characteristics of metals and semiconductors.
Keywords :
Chemical lasers; Laser noise; Laser theory; Micromachining; Optical harmonic generation; Optical pulse shaping; Optical pulses; Semiconductor lasers; Surface emitting lasers; Ultrafast optics;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431526
