Title :
Nano-optics for chemical and materials characterization
Author :
Beversluis, Michael R. ; Stranick, Stephan J.
Author_Institution :
National Institute of Standards and Technology, 100 Bureau Drive, Mail Stop 8372, Gaithersburg, MD 20899, USA
Abstract :
We have developed a hybrid microscope which combines structured-illumination techniques with Raman-spectroscopy to record 100 nm resolution images with chemically-specific contrast. We will show images of semiconductor nanostructures and discuss the technique¿s advantages and requirements.
Keywords :
Chemicals; Fluorescence; Frequency; Image resolution; Laser beams; Laser excitation; Lighting; Microscopy; Optical imaging; Spatial resolution;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431557
