Title :
Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response
Author :
Keymeulen, Didier ; Fink, Wolfgang ; Ferguson, Michael I. ; Peay, Chris ; Oks, Boris ; Terrile, Richard ; Yee, Karl
Author_Institution :
California Inst. of Technol., Pasadena, CA
Abstract :
We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation
Keywords :
evolutionary computation; frequency response; gyroscopes; micromechanical devices; open loop systems; tuning; MEMS device; MEMS gyroscopes; device tuning; evolutionary computation; frequency response measurement; open-loop frequency response; Evolutionary computation; Frequency measurement; Frequency response; Gyroscopes; Microelectromechanical devices; Micromechanical devices; Resonance; Testing; Tuning; Voltage;
Conference_Titel :
Aerospace Conference, 2005 IEEE
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-8870-4
DOI :
10.1109/AERO.2005.1559562
