• DocumentCode
    2791764
  • Title

    Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response

  • Author

    Keymeulen, Didier ; Fink, Wolfgang ; Ferguson, Michael I. ; Peay, Chris ; Oks, Boris ; Terrile, Richard ; Yee, Karl

  • Author_Institution
    California Inst. of Technol., Pasadena, CA
  • fYear
    2005
  • fDate
    5-12 March 2005
  • Firstpage
    1
  • Lastpage
    8
  • Abstract
    We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation
  • Keywords
    evolutionary computation; frequency response; gyroscopes; micromechanical devices; open loop systems; tuning; MEMS device; MEMS gyroscopes; device tuning; evolutionary computation; frequency response measurement; open-loop frequency response; Evolutionary computation; Frequency measurement; Frequency response; Gyroscopes; Microelectromechanical devices; Micromechanical devices; Resonance; Testing; Tuning; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Aerospace Conference, 2005 IEEE
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-8870-4
  • Type

    conf

  • DOI
    10.1109/AERO.2005.1559562
  • Filename
    1559562
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2791764