Title :
Fabrication of micro mirror array with vertical spring structure
Author :
Shin, Jong-Woo ; Kim, Ho-Seong ; Kim, Yong-Kweon ; Choi, Beom-Gyu
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A 50×50 μm2 aluminum micro mirror array is fabricated using surface micromachining technology. 50×50 micro mirrors are arrayed two dimensionally. The micro mirror plate is supported by a vertical spring structure that is placed underneath the mirror plate. When the mirror plates reflect a light, the micro mirror array can have large effective reflecting area. Fabrication of vertical spring uses only one mask and shadow evaporation process
Keywords :
arrays; chemical vapour deposition; micromechanical devices; mirrors; optical fabrication; reflectivity; 50 mum; Al; aluminum micro mirror array fabrication; mirror plate; shadow evaporation process; surface micromachining technology; vertical spring structure; Aluminum; Electrodes; Etching; Fabrication; Fasteners; Mirrors; Optical arrays; Resists; Silicon; Springs;
Conference_Titel :
Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-3685-2
DOI :
10.1109/ETFA.1996.573627
