• DocumentCode
    2792948
  • Title

    Fabrication of micro mirror array with vertical spring structure

  • Author

    Shin, Jong-Woo ; Kim, Ho-Seong ; Kim, Yong-Kweon ; Choi, Beom-Gyu

  • Author_Institution
    Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
  • Volume
    2
  • fYear
    1996
  • fDate
    18-21 Nov 1996
  • Firstpage
    408
  • Abstract
    A 50×50 μm2 aluminum micro mirror array is fabricated using surface micromachining technology. 50×50 micro mirrors are arrayed two dimensionally. The micro mirror plate is supported by a vertical spring structure that is placed underneath the mirror plate. When the mirror plates reflect a light, the micro mirror array can have large effective reflecting area. Fabrication of vertical spring uses only one mask and shadow evaporation process
  • Keywords
    arrays; chemical vapour deposition; micromechanical devices; mirrors; optical fabrication; reflectivity; 50 mum; Al; aluminum micro mirror array fabrication; mirror plate; shadow evaporation process; surface micromachining technology; vertical spring structure; Aluminum; Electrodes; Etching; Fabrication; Fasteners; Mirrors; Optical arrays; Resists; Silicon; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
  • Conference_Location
    Kauai, HI
  • Print_ISBN
    0-7803-3685-2
  • Type

    conf

  • DOI
    10.1109/ETFA.1996.573627
  • Filename
    573627
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2792948