Title :
An optical microcantilever with integrated grating coupler
Author :
Olcum, Selim ; Karademir, Ertugrul ; Tas, Vahdettin ; Akca, Imran ; Kocabas, Askin ; Atalar, Abdullah ; Aydinli, Atilla
Author_Institution :
Dept. of Electr. & Electron. Eng., Bilkent Univ., Ankara, Turkey
Abstract :
In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.
Keywords :
cantilevers; diffraction gratings; elemental semiconductors; integrated optics; micro-optomechanical devices; microfabrication; optical couplers; optical fabrication; silicon; Si; cantilever substrate; integrated grating coupler; microfabrication process; optical microcantilever fabrication; silicon cantilever; Atom optics; Atomic force microscopy; Gratings; Holographic optical components; Holography; Integrated optics; Optical coupling; Optical microscopy; Optical sensors; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5192614
