Design, simulation & modelling of MEMS based comb-drive tunneling effect gyroscope

The principle of electron force microscopy is a well-known phenomenon of sensing in high sensitive MEMS based accelerometers & AFM. We intend to extend this concept towards development of a gyroscope, based on the fact that gyroscope sensors are accelerometers, but with a drive mode. In this paper we present a design of a MEMS based tunneling gyroscope with electron tunneling a sense mechanism. The important parameters required for modeling of the single axis gyroscope is like spring constant, damping coefficient and resonance frequencies are calculated using FEA analysis using COVENTORWARE. A SIMULINK based model is used to examine the response behavior of the model.