Evaluation of a Centrifugal Micropump realized in LTCC-Technology

Fluid control is a critical task in chemical processing. The development of integrated biological monitoring modules with micro-chemical reactors depends on the implementation of pumps. In this project a microfluidic pump was fabricated in LTCC-technology (Low Temperature Cofired Ceramic) where the ceramic tapes carrying the required channel and hole structures were laser micromachined. The device contains plugs and pistons formed by a ferrofluid which were actuated by external magnets. The ferrofluid used for this application is a colloidal suspension of ferromagnetic particles in a hydrocarbon carrier fluid which is immiscible in water.