Title :
Electro-mechanical properties of a micromachined varactor with a wide tuning range [for VCO]
Author :
Dec, A. ; Suyama, Ken
Author_Institution :
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
fDate :
31 May-3 Jun 1998
Abstract :
This paper discusses the electro-mechanical properties of a new micromachined varactor structure that can achieve a wide tuning range. An experimental device was fabricated in a polysilicon surface micromachining process. The varactor achieves a tuning range of 40 percent and a quality factor of 9.75 at 1 GHz when the capacitance is set to 3.62 pF
Keywords :
Q-factor; micromachining; micromechanical devices; tuning; varactors; voltage-controlled oscillators; 1 GHz; 3.62 pF; HF model; LF model; Si; VCO; electromechanical properties; equivalent circuit models; micromachined varactor; multi-user MEMS; polysilicon surface micromachining; quality factor; wide tuning range; Capacitance; Circuit optimization; Electrostatics; P-n junctions; Q factor; Springs; Tunable circuits and devices; Tuning; Varactors; Voltage;
Conference_Titel :
Circuits and Systems, 1998. ISCAS '98. Proceedings of the 1998 IEEE International Symposium on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-4455-3
DOI :
10.1109/ISCAS.1998.698861
