Laser Characterization of the Periodic Line-Space Micro/Nano Structures

Author

Iancu, O. ; Schiopu, P. ; Manea, A. ; Cristea, I. ; Grosu, N.

Author_Institution

Politehnica Univ. of Bucharest, Bucharest

fYear

2007

fDate

9-13 May 2007

Firstpage

383

Lastpage

387

Abstract

Recent advances in micro/nanotechnology devices have demonstrated periodic line-space structure with dimensions of order less than ten nm. Laser scatterometry is a noncontact measurement method for collecting and analyzing of scattered light from the structures. Methods using laser scatterometry can characterize periodic line-space structures. The objective of this paper is three-fold: (1) characterization of laser beam quality which is used for optical metrology; (2) optical characterization of periodic line-space structures; (3) some conclusions regarding experimental results are presented.

Keywords

measurement by laser beam; nanostructured materials; periodic structures; laser beam quality; laser scatterometry; noncontact measurement method; optical metrology;; periodic line-space micro/nano structures; Equations; Gaussian processes; Laser beams; Laser modes; Light scattering; Metrology; Optical scattering; Periodic structures; Quantum cascade lasers; Radar measurements; diffracted light; laser; laser beam; scatterometry; specular light;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology, 30th International Spring Seminar on

Conference_Location

Cluj-Napoca

Print_ISBN

987-1-4244-1218-1

Electronic_ISBN

987-1-4244-1218-1

Type

conf

DOI

10.1109/ISSE.2007.4432884

Filename

4432884