DocumentCode
2797285
Title
Development of micro mechanical parts utilized extra fine wires
Author
Honda, Satoshi
Author_Institution
Tokyo Metropolitan Univ., Tokyo
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
191
Lastpage
194
Abstract
A micro screw, a micro nut, an outer micro gear, an internal micro gear, a helical micro gear, a micro turbine-impeller and other micro mechanical parts are developed by utilizing extra fine wires. The extra fine wires are metallic wires or synthetic fibers which diameters are as small as 30 to 200 micrometers like a stainless wire, a tungsten wire, a copper wire, and a fluorocarbon thread. The micro screw is produced by coiling a pair of these wires around a needle pin without spacing, and by brazing the wires on the pin; besides, by peeling one wire from the brazed pin. Its pitch is less than 100 micrometers, and its major diameter is less than 600 micrometers. Other micro mechanical parts are also produced by same processes. In this paper, a novel manufacturing method for the micro mechanical parts utilized extra fine wires is developed, and several micro mechanical parts are produced as prompt products. Moreover, a micro positioning stage and reduction micro gear systems are developed as trial manufactures, and the micro turbine system is proposed as a new engine for the micro systems without electrostatic or magnetic drives.
Keywords
copper; fasteners; gears; impellers; manufacturing processes; micromechanical devices; tungsten; turbines; wires; Cu; W; copper wire; extra fine wires; fluorocarbon thread; helical micro gear; internal micro gear; metallic wires; micro nut; micro screw; micro turbine-impeller; micromechanical parts manufacturing method; outer micro gear; stainless wire; synthetic fibers; tungsten wire; Copper; Fasteners; Gears; Needles; Pulp manufacturing; Synthetic fibers; Tungsten; Turbines; Wires; Yarn;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4432962
Filename
4432962
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