Title :
A new fabrication process for micro optical elements using drie and oxidation
Author :
Ohara, Junji ; Kano, Kazuhiko ; Takeuchi, Yukihiro
Author_Institution :
Denso Corp., Nisshin
Abstract :
We have developed a new fabrication process of micro optical elements by applying DRIE (Deep Reactive Ion Etching) process and thermal oxidation, which enables us to make micro lenses and prisms on a silicon substrate without assembling. This process can also form other optical elements, such as light wave-guides by changing mask pattern.
Keywords :
masks; microlenses; optical fabrication; optical prisms; optical waveguides; oxidation; silicon; sputter etching; DRIE; deep reactive ion etching; fabrication process; light wave-guides; mask pattern; micro lenses; micro optical elements; oxidation; prisms; silicon substrate; thermal oxidation; Etching; Lenses; Optical arrays; Optical device fabrication; Optical devices; Optical films; Oxidation; Semiconductor laser arrays; Silicon compounds; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4432968
