Title :
Thermo-pneumatically actuated piston mirror arrays
Author :
Werber, Armin ; Zappe, Hans
Author_Institution :
Univ. of Freiburg, Freiburg
Abstract :
A novel design for thermo-pneumatically actuated, membrane-based micro-mirrors is presented. Arrays of seven hexagonally shaped piston mirrors, where each mirror element is driven by a separate micro-hotplate, are described. The silicon mirror device is etched from the substrate and fixed to a 50 mum thick elastomer membrane. Piston motion is achieved by thermo-pneumatically induced volume extension of a fluid, generated by platinum micro-hotplates. Large strokes, up to 80 mum, and accurate piston motion were demonstrated.
Keywords :
elastomers; membranes; micromirrors; silicon; elastomer membrane; hexagonally shaped piston mirrors; membrane-based micro-mirrors; piston motion; platinum micro-hotplates; size 50 mum; thermo-pneumatically actuated piston mirror arrays; thermo-pneumatically induced volume extension; Biomembranes; Dry etching; Mirrors; Pistons; Platinum; Rough surfaces; Silicon; Surface resistance; Surface roughness; Thermal expansion;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4432995
