DocumentCode
2797731
Title
Thermo-pneumatically actuated piston mirror arrays
Author
Werber, Armin ; Zappe, Hans
Author_Institution
Univ. of Freiburg, Freiburg
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
703
Lastpage
706
Abstract
A novel design for thermo-pneumatically actuated, membrane-based micro-mirrors is presented. Arrays of seven hexagonally shaped piston mirrors, where each mirror element is driven by a separate micro-hotplate, are described. The silicon mirror device is etched from the substrate and fixed to a 50 mum thick elastomer membrane. Piston motion is achieved by thermo-pneumatically induced volume extension of a fluid, generated by platinum micro-hotplates. Large strokes, up to 80 mum, and accurate piston motion were demonstrated.
Keywords
elastomers; membranes; micromirrors; silicon; elastomer membrane; hexagonally shaped piston mirrors; membrane-based micro-mirrors; piston motion; platinum micro-hotplates; size 50 mum; thermo-pneumatically actuated piston mirror arrays; thermo-pneumatically induced volume extension; Biomembranes; Dry etching; Mirrors; Pistons; Platinum; Rough surfaces; Silicon; Surface resistance; Surface roughness; Thermal expansion;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4432995
Filename
4432995
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