DocumentCode :
2797751
Title :
Electrostatically actuated micromirror for resonant cavity enhanced detectors
Author :
Quack, Niels ; Züst, Ivan ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Rahim, Mohamed ; Zogg, Hans
Author_Institution :
ETH Zurich, Zurich
fYear :
2007
fDate :
21-25 Jan. 2007
Firstpage :
711
Lastpage :
714
Abstract :
This paper presents the design, fabrication and measurement results of a vertically moving, electrostatically actuated micromirror. The single crystalline silicon substrate allows the design of a symmetrical and mechanically stable mirror suspension while keeping a geometry with high fill factors and maintaining elasticity and thus keeping the actuation voltage below 25 V. The device is being developed for the use in a tunable resonant cavity enhanced detector (RCED) for the mid-infrared (Arnold, 2005). RCED´s make use of a standing wave formed in an optical cavity and are only sensitive at the resonances. The wavelengths of the resonances are hereby depending on the distance of the two cavity mirrors (Unlu, 1995). Such narrowband detector systems are sought- after in multispectral infrared (IR) thermography or infrared spectroscopy (Musca, 2005).
Keywords :
electrostatic actuators; infrared detectors; microcavities; micromirrors; silicon; Si; cavity mirrors; elasticity; electrostatically actuated micromirror; mid-infrared detectors; mirror suspension; optical cavity; resonant cavity enhanced detectors; single crystalline silicon substrate; Crystallization; Electrostatic measurements; Fabrication; Geometrical optics; Infrared detectors; Infrared spectra; Micromirrors; Mirrors; Resonance; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
ISSN :
1084-6999
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2007.4432997
Filename :
4432997
Link To Document :
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