Fully integrated three dimensional sound intensity sensor

Author

Yntema, D.R. ; Wiegerink, R.J. ; van Honschoten, J.W. ; Elwenspoek, M.

Author_Institution

Univ. of Twente, Enschede

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

51

Lastpage

54

Abstract

For the first time, a complete 3-dimensional sound intensity sensor - consisting of 4 particle velocity sensors and a pressure microphone - has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.

Keywords

acoustic intensity measurement; acoustic wave velocity measurement; microphones; pressure sensors; surface acoustic wave sensors; 3D sound intensity sensor; acoustic particle velocity; particle velocity sensors; pressure microphone; pressure sensor; sound pressure; Acoustic devices; Acoustic measurements; Acoustic reflection; Acoustic sensors; Impedance; Particle measurements; Pressure measurement; Semiconductor device measurement; Transfer functions; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433010

Filename

4433010