Intergrated resonant cantilever sensors with 2nd torsion-mode for fg-level resoluble biomedical detection

Presented is a silicon microcantilever resonant sensor with Lorentz-force exciting and piezoresistive sensing elements integrated for ultra-resoluble biomedical detection. A 2^nd torsional resonance mode is excited for high Q-factor, high mass sensitivity and high mass resolution. After the sensor design and fabrication, the sensing properties are tested by biotin-avidin specific binding. With ng/mL level immuno-sensing experiment for the hepatoma antigene of AFP, the sensor shows promise for cancer early-stage prognosis.