3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system

Author

Jeong, Ok Chan ; Konishi, Satoshi

Author_Institution

Ritsumeikan Univ., Shiga

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

111

Lastpage

114

Abstract

This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO₂ are characterized.

Keywords

carbon; gas sensors; nitrogen compounds; photoresists; pneumatic control equipment; polymers; pyrolysis; valves; 3D bridge-type resistive heater; NO₂; carbon structures; gas regulator; gas sensor; nitrogen dioxide sensor; polymeric gas detection system; pyrolyzed photo-resist structure; three dimensionality combined pyrolyzed polymer sensor; three-stage pneumatic valves; Electrical resistance measurement; Fabrication; Gas detectors; Polymers; Regulators; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Thermal sensors; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433027

Filename

4433027