• DocumentCode
    2798223
  • Title

    Micromachined front-end for 60 GHz applications

  • Author

    Bunea, A. ; Neculoiu, Dan ; Calmon, Pierre ; Takacs, Alexandru

  • Author_Institution
    Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania
  • Volume
    1
  • fYear
    2012
  • fDate
    15-17 Oct. 2012
  • Firstpage
    197
  • Lastpage
    200
  • Abstract
    In this paper we present the electromagnetic modeling, fabrication and experimental results of a on-chip 2×1 folded slot dipole antenna array manufactured through silicon micromachining, working in the 60 GHz band. The measurements are in very good agreement with the simulations and demonstrate a large working band of ~20% (54-65 GHz) for a return loss better than 10 dB.
  • Keywords
    dipole antenna arrays; micromachining; silicon; slot antenna arrays; electromagnetic fabrication; electromagnetic modeling; micromachined front-end; on-chip folded slot dipole antenna array; silicon micromachining; Antenna arrays; Antenna measurements; Arrays; Dipole antennas; Silicon; Slot antennas; 60 GHz; EM modeling; antennas; silicon micromachining;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2012 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-857X
  • Print_ISBN
    978-1-4673-0737-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2012.6400655
  • Filename
    6400655