Self-generated peristaltic motion of cascaded diaphragm actuators for micro fluidic systems

This paper presents the self-generated peristaltic motion of cascaded diaphragm actuators for micro fluidic systems. The micro pump unit consists of the three actuators connecting with a single pneumatic supply channel. The proposed working principle is based on the time delay effect of the cascaded actuators caused by the increment of the fluidic resistance along the micro channel and the stored fluidic capacitance of actuator diaphragms. The proposed operational method is verified through the simulation of the static deformation of the cascaded actuator diaphragms and the characterization of the fabricated micro pump unit in the air. The dual operational modes such as the rubber-seal valve and the peristaltic pumping mode are confirmed from the test of the single and multi-pump unit with the liquid.